Precision Positioning System by Coupled Use of Pneumatic and Ultrasonic Actuators.
نویسندگان
چکیده
منابع مشابه
Pneumatic Positioning System for Precision Assembly
Micro assembly is typically characterised by positioning tolerances below a few micrometers. In the case of a hybrid micro system assembly, such as optical glass fibres, micro ball lenses or micro probes for measurement tasks, even positioning accuracies in the sub-micrometer range have to be achieved. Due to the need for highly accurate assembly systems and extensive alignment procedures the a...
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ژورنال
عنوان ژورنال: Hydraulics & Pneumatics
سال: 1993
ISSN: 0286-6900,2185-5285
DOI: 10.5739/jfps1970.24.394